Strain Engineering of Germanium Nanobeams by Electrostatic Actuation

MEM Analog Tunable Gratings by Electrostatic Actuation

Electrostatic actuation of silicon optomechanical resonators.

Cavity optomechanical systems offer one of the most sensitive methods for detecting mechanical motion using shifts in the optical resonance frequency of the optomechanical resonator. Presently, these systems are used for measuring mechanical thermal noise displacement or mechanical motion actuated by optical forces. Electrostatic capacitive actuation and detection have been shown previously for...

Nonlinear static and dynamic behaviors of a microresonator under discontinuous electrostatic actuation

This article studied static deflection, natural frequency and nonlinear vibration of a clamped-clamped microbeam under discontinues electrostatic actuation. The electrostatic actuation was induced by applying AC-DC voltage between the microbeam and electrode plate. In contrast to previous works, it was assumed that length of the electrode plate was smaller than that of the microbeam. In additio...

Parallel-plate electrostatic actuation with vertical hinges

A microactuating structure with vertical polyimide hinges has been designed, fabricated and tested. Unlike traditional microactuators, which are located on the substrate surface, this new actuation mechanism is capable of producing linear motion at a point far from the substrate. This advantage can make it possible to drive other out-of-plane folded structures for on-wafer or out-of-wafer appli...

Tracking and Shape Control of a Micro-cantilever using Electrostatic Actuation

In this paper the problems of state estimation, tracking control and shape control in a micro-cantilever beam with nonlinear electrostatic actuation are investigated. The system’s partial differential equation of motion is converted into a set of ordinary differential equations by projection method. Observabillity of the system is proven and a state estimation system is designed using extended ...